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Post patterning meso porosity creation: a potential solution for pore sealing

dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorHoofman, Romano
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBrom - Verheyden, Greja
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorTokei, Zsolt
dc.contributor.authorIacopi, Francesca
dc.contributor.authorCarbonell, Laure
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorDas, Arabinda
dc.contributor.authorVos, Ingrid
dc.contributor.authorDemuynck, Steven
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:05:15Z
dc.date.available2021-10-15T04:05:15Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7272
dc.sourceIIOimport
dc.titlePost patterning meso porosity creation: a potential solution for pore sealing
dc.typeProceedings paper
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBrom - Verheyden, Greja
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewno
dc.source.beginpage242
dc.source.endpage244
dc.source.conferenceInternational Interconnect Technology Conference
dc.source.conferencedate2/06/2003
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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