dc.contributor.author | Caluwaerts, Rudy | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Hoofman, Romano | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Brom - Verheyden, Greja | |
dc.contributor.author | Waeterloos, Joost | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Das, Arabinda | |
dc.contributor.author | Vos, Ingrid | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T04:05:15Z | |
dc.date.available | 2021-10-15T04:05:15Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7272 | |
dc.source | IIOimport | |
dc.title | Post patterning meso porosity creation: a potential solution for pore sealing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Caluwaerts, Rudy | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Hoofman, Romano | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Brom - Verheyden, Greja | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Vos, Ingrid | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Hoofman, Romano::0000-0001-8740-104X | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.source.peerreview | no | |
dc.source.beginpage | 242 | |
dc.source.endpage | 244 | |
dc.source.conference | International Interconnect Technology Conference | |
dc.source.conferencedate | 2/06/2003 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |