Authors

Carbonell, Laure; Vereecke, Guy; Van Elshocht, Sven; Caymax, Matty; Van Hove, Marleen; Maex, Karen; Mertens, Paul

Conference

IC Techniques for Semiconductor Materials, Devices, and Processes

Title

Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization

Publication type

Proceedings paper

Embargo date

9999-12-31