Show simple item record

Characterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization

dc.contributor.authorCarbonell, Laure
dc.contributor.authorVereecke, Guy
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCaymax, Matty
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T04:05:35Z
dc.date.available2021-10-15T04:05:35Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7276
dc.sourceIIOimport
dc.titleCharacterization of advanced semiconductor materials by thermal desorption mass spectrometry with atmospheric pressure ionization
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage150
dc.source.endpage159
dc.source.conferenceIC Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 2003-03


Files in this item

Thumbnail
Name:
8142.pdf
Size:
563.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record