Different nature of process-induced and stress-induced defects in thin SiO2 layers

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Authors

Cellere, G.; Valentini, M.G.; Pantisano, Luigi; Cheung, K.P.; Paccagnella, A.

Issue

6

Journal

IEEE Electron Device Letters

Volume

24

Title

Different nature of process-induced and stress-induced defects in thin SiO2 layers

Publication type

Journal article

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