Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe

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Authors
Caymax, Matty; Leong, W. Y.
Editors
Nijs, Johan
Book
Advanced Silicon and Semiconducting Silicon Alloy-Based Materials and Devices
Title
Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe
Publication type
Book chapter
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