dc.contributor.author | Chamirian, Oxana | |
dc.contributor.author | de Potter de ten Broeck, Muriel | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Lindsay, Richard | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T04:07:28Z | |
dc.date.available | 2021-10-15T04:07:28Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7300 | |
dc.source | IIOimport | |
dc.title | Sidewall grooving on CoSi2 narrow lines | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.source.peerreview | no | |
dc.source.beginpage | 155 | |
dc.source.endpage | 160 | |
dc.source.conference | Advanced Short-Time Thermal Processing for Si-based CMOS devices | |
dc.source.conferencedate | 27/04/2003 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - imec | |
imec.internalnotes | Electrochemical Society Proceedings; PV 2003-14 | |