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Sidewall grooving on CoSi2 narrow lines
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Authors
Chamirian, Oxana
;
de Potter de ten Broeck, Muriel
;
Lauwers, Anne
;
Richard, Olivier
;
Lindsay, Richard
;
Vrancken, Christa
;
Maex, Karen
Conference
Advanced Short-Time Thermal Processing for Si-based CMOS devices
Title
Sidewall grooving on CoSi2 narrow lines
Publication type
Proceedings paper
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