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Sidewall grooving on CoSi2 narrow lines
Publication:
Sidewall grooving on CoSi2 narrow lines
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chamirian, Oxana
;
de Potter de ten Broeck, Muriel
;
Lauwers, Anne
;
Richard, Olivier
;
Lindsay, Richard
;
Vrancken, Christa
;
Maex, Karen
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2028
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
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Views
2028
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations