Publication:

Sidewall grooving on CoSi2 narrow lines

Date

2003

Proceedings Paper

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Author(s)

Chamirian, Oxana

;

de Potter de ten Broeck, Muriel

;

;

Richard, Olivier

;

Lindsay, Richard

;

Vrancken, Christa

;

Statistics

2032 since deposited on 2021-10-15

Acq. date: 2026-04-30