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Screening the high-k layer quality by means of open circuit potential analysis and wet chemical etching
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Authors
Claes, Martine
;
De Gendt, Stefan
;
Witters, Thomas
;
Kaushik, Vidya
;
Chen, Jerry
;
Conard, Thierry
;
Delabie, Annelies
;
Van Elshocht, Sven
;
Heyns, Marc
Conference
Novel Materials and Processes for Advanced CMOS
Title
Screening the high-k layer quality by means of open circuit potential analysis and wet chemical etching
Publication type
Proceedings paper
Embargo date
9999-12-31
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