Authors

Claes, Martine; Paraschiv, Vasile; Boutkabout, Hakim; De Gendt, Stefan; Richard, Olivier; Lindsay, Richard; Boullart, Werner; Heyns, Marc

Conference

204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials

Title

Selective wet etching of Hf-based layers

Publication type

Meeting abstract