Authors

Clarysse, Trudo; Hoflijk, Ilse; Zhang, Wenqi; Maex, Karen; Vandervorst, Wilfried

Conference

Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.

Title

Metal film characterization with qualified spreading resistance

Publication type

Proceedings paper