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Carrier illumination for characterization of ultra-shallow doping profiles

dc.contributor.authorClarysse, Trudo
dc.contributor.authorLindsay, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBudiarto, E.
dc.contributor.authorBorden, Peter
dc.date.accessioned2021-10-15T04:10:20Z
dc.date.available2021-10-15T04:10:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7332
dc.sourceIIOimport
dc.titleCarrier illumination for characterization of ultra-shallow doping profiles
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage321
dc.source.endpage330
dc.source.conferenceUltra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.
dc.source.conferencedate27/04/2003
dc.source.conferencelocationSanta Cruz, CA USA
imec.availabilityPublished - imec


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