Low temperature zero-level hermetic packaging for MEMS based on solder and polymer bonding

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Authors
De Moor, Piet; Baert, Kris; Du Bois, Bert; Jamieson, Geraldine; Jourdain, Anne; Tilmans, Harrie; Van De Peer, Myriam; Witvrouw, Ann; Van Hoof, Chris
Conference
IMAPS 5th Topical Technology Workshop on MEMS, Related Microsystems and Nanopackaging
Title
Low temperature zero-level hermetic packaging for MEMS based on solder and polymer bonding
Publication type
Meeting abstract
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