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Structural characterization of mesoporous organosilica films for ultralow-k dielectrics
Publication:
Structural characterization of mesoporous organosilica films for ultralow-k dielectrics
Date
2003
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
de Theije, F.K.
;
Balkenende, A.R.
;
Verheyen, M.A.
;
Baklanov, Mikhaïl
;
Moguilnikov, Konstantin
;
Furukawa, Y.
Journal
Journal of Physical Chemistry B
Abstract
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1960
since deposited on 2021-10-15
Acq. date: 2025-10-28
Citations
Metrics
Views
1960
since deposited on 2021-10-15
Acq. date: 2025-10-28
Citations