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Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks
Publication:
Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Degraeve, Robin
;
Kauerauf, Thomas
;
Kerber, Andreas
;
Cartier, E.
;
Govoreanu, Bogdan
;
Roussel, Philippe
;
Pantisano, Luigi
;
Blomme, Pieter
;
Kaczer, Ben
;
Groeseneken, Guido
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1859
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1859
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations