Show simple item record

Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks

dc.contributor.authorDegraeve, Robin
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorKerber, Andreas
dc.contributor.authorCartier, E.
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorPantisano, Luigi
dc.contributor.authorBlomme, Pieter
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-15T04:27:23Z
dc.date.available2021-10-15T04:27:23Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7478
dc.sourceIIOimport
dc.titleStress polarity dependence of degradation and breakdown of SiO2/high-k stacks
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.beginpage23
dc.source.endpage28
dc.source.conferenceProceedings 41st Annual IEEE International Reliability Physics Symposium
dc.source.conferencedate30/03/2003
dc.source.conferencelocationDallas, TX USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record