Publication:

Investigation on mc-Si bulk passivation using deuterated silicon-nitride

Date

2003

Proceedings Paper

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Author(s)

Dekkers, Harold

;

De Wolf, Stefaan

;

Agostinelli, Guido

;

Szlufcik, Jozef

;

;

Arnoldbik, W.M.

;

;

Schropp, R.E.I.

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1965 since deposited on 2021-10-15

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Acq. date: 2026-04-05