Show simple item record

ALD High-k growth on Ge substrates

dc.contributor.authorDelabie, Annelies
dc.contributor.authorBrijs, Bert
dc.contributor.authorCaymax, Matty
dc.contributor.authorChiarella, Thomas
dc.contributor.authorConard, Thierry
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorZhao, Chao
dc.contributor.authorHeyns, Marc
dc.contributor.authorMeuris, Marc
dc.date.accessioned2021-10-15T04:28:31Z
dc.date.available2021-10-15T04:28:31Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7486
dc.sourceIIOimport
dc.titleALD High-k growth on Ge substrates
dc.typeMeeting abstract
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition
dc.source.conferencedate4/08/2003
dc.source.conferencelocationSan José, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record