ALD High-k growth on Ge substrates

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Authors
Delabie, Annelies; Brijs, Bert; Caymax, Matty; Chiarella, Thomas; Conard, Thierry; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Teerlinck, Ivo; Zhao, Chao; Heyns, Marc; Meuris, Marc
Conference
Atomic Layer Deposition
Title
ALD High-k growth on Ge substrates
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Meeting abstract
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