Publication:

ALD High-k growth on Ge substrates

Date

2003

Meeting abstract

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Author(s)

Delabie, Annelies

;

;

;

Chiarella, Thomas

;

Conard, Thierry

;

Puurunen, Riikka

;

Richard, Olivier

;

Van Steenbergen, Jan

;

;

;

;

Statistics

2077 since deposited on 2021-10-15

Acq. date: 2026-02-25