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Conference contributions
ALD High-k growth on Ge substrates
Publication:
ALD High-k growth on Ge substrates
Date
2003
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Delabie, Annelies
;
Brijs, Bert
;
Caymax, Matty
;
Chiarella, Thomas
;
Conard, Thierry
;
Puurunen, Riikka
;
Richard, Olivier
;
Van Steenbergen, Jan
;
Teerlinck, Ivo
;
Zhao, Chao
;
Heyns, Marc
;
Meuris, Marc
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2073
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2073
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations