Publication:

ALD High-k growth on Ge substrates

Date

2003

Meeting abstract

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Author(s)

Delabie, Annelies

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;

;

Chiarella, Thomas

;

Conard, Thierry

;

Puurunen, Riikka

;

Richard, Olivier

;

Van Steenbergen, Jan

;

;

;

;

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