Publication:

ALD High-k growth on Ge substrates

Date

2003
Meeting abstract
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorBrijs, Bert
dc.contributor.authorCaymax, Matty
dc.contributor.authorChiarella, Thomas
dc.contributor.authorConard, Thierry
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorZhao, Chao
dc.contributor.authorHeyns, Marc
dc.contributor.authorMeuris, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2021-10-15T04:28:31Z
dc.date.available2021-10-15T04:28:31Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7486
dc.source.conferenceAtomic Layer Deposition
dc.source.conferencedate4/08/2003
dc.source.conferencelocationSan José, CA USA
dc.title

ALD High-k growth on Ge substrates

dc.typeMeeting abstract
dspace.entity.typePublication
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