Authors

Ding, F.R.; He, W.; Vantomme, Andre; Zhao, Q.; Pipeleers, B.; Jacobs, K.; Moerman, Ingrid

Issue

1

Journal

Materials Science and Engineering B

Volume

98

Title

Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBS

Publication type

Journal article

Embargo date

9999-12-31