dc.contributor.author | Duhayon, Natasja | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Alvarez, David | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Fouchier, Marc | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Hellemans, L. | |
dc.date.accessioned | 2021-10-15T04:35:10Z | |
dc.date.available | 2021-10-15T04:35:10Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7533 | |
dc.source | IIOimport | |
dc.title | Two dimensional carrier profiling using scanning capacitance microscopy | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Duhayon, Natasja | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 293 | |
dc.source.endpage | 304 | |
dc.source.conference | Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes | |
dc.source.conferencedate | 27/04/2003 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access | |
imec.internalnotes | Electrochemical Society Proceedings; PV 2003-03 | |