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Two dimensional carrier profiling using scanning capacitance microscopy

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorClarysse, Trudo
dc.contributor.authorAlvarez, David
dc.contributor.authorEyben, Pierre
dc.contributor.authorFouchier, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-15T04:35:10Z
dc.date.available2021-10-15T04:35:10Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7533
dc.sourceIIOimport
dc.titleTwo dimensional carrier profiling using scanning capacitance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage293
dc.source.endpage304
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; PV 2003-03


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