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Impact of charging on breakdown in deep trench isolation structures

dc.contributor.authorElattari, Brahim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorSchoenmaker, Wim
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorCoppens, P.
dc.contributor.authorMoens, P.
dc.contributor.authorDe Pestel, F.
dc.date.accessioned2021-10-15T04:38:04Z
dc.date.available2021-10-15T04:38:04Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7552
dc.sourceIIOimport
dc.titleImpact of charging on breakdown in deep trench isolation structures
dc.typeProceedings paper
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.source.peerreviewyes
dc.source.beginpage513
dc.source.endpage516
dc.source.conferenceProceedings 33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - imec


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