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Impact of charging on breakdown in deep trench isolation structures
Publication:
Impact of charging on breakdown in deep trench isolation structures
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Elattari, Brahim
;
Van den Bosch, Geert
;
Schoenmaker, Wim
;
Groeseneken, Guido
;
Coppens, P.
;
Moens, P.
;
De Pestel, F.
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1938
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1938
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations