Publication:
Impact of charging on breakdown in deep trench isolation structures
Date
| dc.contributor.author | Elattari, Brahim | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Schoenmaker, Wim | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Coppens, P. | |
| dc.contributor.author | Moens, P. | |
| dc.contributor.author | De Pestel, F. | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.date.accessioned | 2021-10-15T04:38:04Z | |
| dc.date.available | 2021-10-15T04:38:04Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7552 | |
| dc.source.beginpage | 513 | |
| dc.source.conference | Proceedings 33rd European Solid-State Devices Research Conference - ESSDERC | |
| dc.source.conferencedate | 16/09/2003 | |
| dc.source.conferencelocation | Estoril Portugal | |
| dc.source.endpage | 516 | |
| dc.title | Impact of charging on breakdown in deep trench isolation structures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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