Publication:

Impact of charging on breakdown in deep trench isolation structures

Date

2003

Proceedings Paper

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Author(s)

Elattari, Brahim

;

Van den Bosch, Geert

;

Schoenmaker, Wim

;

Groeseneken, Guido

;

;

;

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1943 since deposited on 2021-10-15

Acq. date: 2026-04-26