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Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries

dc.contributor.authorErnur, Didem
dc.contributor.authorSchuhmacher, Jörg
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorShamiryan, Denis
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:38:49Z
dc.date.available2021-10-15T04:38:49Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7557
dc.sourceIIOimport
dc.titleGalvanic corrosion testing of WCxNy barrier metal in H202 based slurries
dc.typeProceedings paper
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage95
dc.source.endpage101
dc.source.conferenceProceedings of the Advanced Metallization Conference 2002
dc.source.conferencedate1/10/2002
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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