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Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

dc.contributor.authorFouchier, Marc
dc.contributor.authorEyben, Pierre
dc.contributor.authorAlvarez, David
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorXu, Mingwei
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorLisoni, Judit
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T04:41:37Z
dc.date.available2021-10-15T04:41:37Z
dc.date.issued2003-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7575
dc.sourceIIOimport
dc.titleFabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage607
dc.source.endpage616
dc.source.conferenceSmart Sensors, Actuators, and MEMS
dc.source.conferencedate19/05/2003
dc.source.conferencelocationMaspalomas, Gran Canaria Spain
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; 5116


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