Authors

Fouchier, Marc; Eyben, Pierre; Alvarez, David; Duhayon, Natasja; Xu, Mingwei; Brongersma, Sywert; Lisoni, Judit; Vandervorst, Wilfried

Conference

Smart Sensors, Actuators, and MEMS

Title

Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

Publication type

Proceedings paper

Embargo date

9999-12-31