Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping

dc.contributor.author	Fouchier, Marc
dc.contributor.author	Eyben, Pierre
dc.contributor.author	Alvarez, David
dc.contributor.author	Duhayon, Natasja
dc.contributor.author	Xu, Mingwei
dc.contributor.author	Brongersma, Sywert
dc.contributor.author	Lisoni, Judit
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Duhayon, Natasja
dc.contributor.imecauthor	Brongersma, Sywert
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Brongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned	2021-10-15T04:41:37Z
dc.date.available	2021-10-15T04:41:37Z
dc.date.embargo	9999-12-31
dc.date.issued	2003-05
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7575
dc.source.beginpage	607
dc.source.conference	Smart Sensors, Actuators, and MEMS
dc.source.conferencedate	19/05/2003
dc.source.conferencelocation	Maspalomas, Gran Canaria Spain
dc.source.endpage	616
dc.title	Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
dc.type	Proceedings paper
dspace.entity.type	Publication
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