dc.contributor.author | Hellin, David | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Puurunen, Riikka | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Vinckier, Chris | |
dc.date.accessioned | 2021-10-15T04:53:23Z | |
dc.date.available | 2021-10-15T04:53:23Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7645 | |
dc.source | IIOimport | |
dc.title | Chlorine detection and quantification in ALCVD HfO2 high-k dielectric films using total reflection X-ray fluorescence spectrometry | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Hellin, David | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.conference | 204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials | |
dc.source.conferencedate | 13/10/2003 | |
dc.source.conferencelocation | Orlando, FL USA | |
imec.availability | Published - imec | |
imec.internalnotes | Abstract 569 | |