Publication:
Chlorine detection and quantification in ALCVD HfO2 high-k dielectric films using total reflection X-ray fluorescence spectrometry
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1966 since deposited on 2021-10-15
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Acq. date: 2026-01-09
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Views
1966 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-01-09
Citations