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Chlorine detection and quantification in ALCVD HfO2 high-k dielectric films using total reflection X-ray fluorescence spectrometry
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1962 since deposited on 2021-10-15
Acq. date: 2025-10-23
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Views
1962 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations