Epitaxial erbium silicide contact to silicon-germanium

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Authors
Horvath, Z.; Molnart, G.; Peto, G.; Deszi, I.; Loo, Roger; Caymax, Matty; Z'd'ansky, K.
Conference
International Conference Micro- and Nanoelectronics - ICMNE
Title
Epitaxial erbium silicide contact to silicon-germanium
Publication type
Oral presentation
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