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Model for defect generation at the (100) Si/SiO2 interface during electron injection in MOS structures
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Authors
Houssa, Michel
;
Autran, J.L.
;
Heyns, Marc
;
Stesmans, Andre
Journal
Applied Surface Science
Volume
212-213
Title
Model for defect generation at the (100) Si/SiO2 interface during electron injection in MOS structures
Publication type
Journal article
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