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Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe
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1914 since deposited on 2021-10-15
Acq. date: 2025-12-16
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Views
1914 since deposited on 2021-10-15
Acq. date: 2025-12-16
Citations