Authors

Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Brongersma, Sywert; Vanhaeren, Danielle; Maex, Karen

Issue

1_2

Journal

Microelectronic Engineering

Volume

65

Title

Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers

Publication type

Journal article