Publication:
Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
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1907 since deposited on 2021-10-15
3last month
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Acq. date: 2026-02-24
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Statistics
Views
1907 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-02-24
Citations