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Optimization of 0-level packaging for RF-MEMS devices

dc.contributor.authorJourdain, Anne
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorCarchon, Geert
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T05:05:19Z
dc.date.available2021-10-15T05:05:19Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7711
dc.sourceIIOimport
dc.titleOptimization of 0-level packaging for RF-MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage1915
dc.source.endpage1918
dc.source.conferenceTransducers 2003, 12th Int. conf. on Solid-State Sensors, Actuators and Transducers
dc.source.conferencedate8/06/2003
dc.source.conferencelocationBoston USA
imec.availabilityPublished - imec


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