Challenges in scaling of CMOS devices towards 65nm node

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Authors
Jurczak, Gosia; Veloso, Anabela; Rooyackers, Rita; Augendre, Emmanuel; Mertens, Sofie; Rothschild, Aude; Schaekers, Marc; Lindsay, Richard; Lauwers, Anne; Henson, Kirklen; Severi, Simone; Pollentier, Ivan; De Keersgieter, An
Conference
Diagnostic and Yield
Title
Challenges in scaling of CMOS devices towards 65nm node
Publication type
Proceedings paper
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