dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Rooyackers, Rita | |
dc.contributor.author | Augendre, Emmanuel | |
dc.contributor.author | Mertens, Sofie | |
dc.contributor.author | Rothschild, Aude | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Lindsay, Richard | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Henson, Kirklen | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Pollentier, Ivan | |
dc.contributor.author | De Keersgieter, An | |
dc.date.accessioned | 2021-10-15T05:05:54Z | |
dc.date.available | 2021-10-15T05:05:54Z | |
dc.date.issued | 2003-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7714 | |
dc.source | IIOimport | |
dc.title | Challenges in scaling of CMOS devices towards 65nm node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Mertens, Sofie | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Pollentier, Ivan | |
dc.contributor.imecauthor | De Keersgieter, An | |
dc.contributor.orcidimec | Mertens, Sofie::0000-0002-1482-6730 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
dc.source.peerreview | no | |
dc.source.conference | Diagnostic and Yield | |
dc.source.conferencedate | 23/06/2003 | |
dc.source.conferencelocation | Warsaw Poland | |
imec.availability | Published - imec | |
imec.internalnotes | proceedings from this conference are available only on CD | |