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Stress induced charge trapping effects in SiO2/Al2O3 gate stacks with TiN electrodes
Publication:
Stress induced charge trapping effects in SiO2/Al2O3 gate stacks with TiN electrodes
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kerber, Andreas
;
Cartier, E.
;
Groeseneken, Guido
;
Maes, Herman
;
Schwalke, U.
Journal
Journal of Applied Physics
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2027
since deposited on 2021-10-15
Acq. date: 2025-12-09
Citations
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Views
2027
since deposited on 2021-10-15
Acq. date: 2025-12-09
Citations