Characterization of the Vt-instability un SiO2 HFO2 gate dielectrics

Thumbnail
Metadata
Show full item record
Authors
Kerber, Andreas; Cartier, E.; Pantisano, Luigi; Rosmeulen, Maarten; Degraeve, Robin; Kauerauf, Thomas; Groeseneken, Guido; Maes, Herman; Schwalke, U.
Conference
Proceedings 41st Annual IEEE International Reliability Physics Symposium
Title
Characterization of the Vt-instability un SiO2 HFO2 gate dielectrics
Publication type
Proceedings paper
Collections