Ni-based silicides: material issues for advanced CMOS applications

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Authors
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Van Dal, Mark; Akheyar, Amal; Richard, Olivier; Lisoni, Judit; de Potter de ten Broeck, Muriel; Lindsay, Richard; Maex, Karen
Conference
Advanced Short-Time Thermal Processing for Si-based CMOS devices
Title
Ni-based silicides: material issues for advanced CMOS applications
Publication type
Proceedings paper
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