Publication:

TaN metal gate MOSFETs with agressively scaled HfO2 dielectrics

Date

2003

Proceedings Paper

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Author(s)

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Lujan, Guilherme

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Vertommen, Johan

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Boullart, Werner

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Van Elshocht, Sven

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Carter, Richard

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Kubicek, Stefan

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De Meyer, Kristin

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De Gendt, Stefan

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Metrics

1934 since deposited on 2021-10-15

Acq. date: 2025-12-10