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A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation

dc.contributor.authorLauerhaas, Jeff
dc.contributor.authorWu, Y.
dc.contributor.authorBran, M.
dc.contributor.authorFraser, B.
dc.contributor.authorBrause, E.
dc.contributor.authorNicolosi, T.
dc.date.accessioned2021-10-15T05:18:58Z
dc.date.available2021-10-15T05:18:58Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7780
dc.sourceIIOimport
dc.titleA theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage151
dc.source.endpage157
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate16/09/2002
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 92


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