A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation

Publication:

2003

Proceedings Paper

Author(s)

Lauerhaas, Jeff

;

Wu, Y.

;

Bran, M.

;

Fraser, B.

;

Brause, E.

;

Nicolosi, T.

1949 since deposited on 2021-10-15

Acq. date: 2025-12-10