A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation

dc.contributor.author	Lauerhaas, Jeff
dc.contributor.author	Wu, Y.
dc.contributor.author	Bran, M.
dc.contributor.author	Fraser, B.
dc.contributor.author	Brause, E.
dc.contributor.author	Nicolosi, T.
dc.date.accessioned	2021-10-15T05:18:58Z
dc.date.available	2021-10-15T05:18:58Z
dc.date.embargo	9999-12-31
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7780
dc.source.beginpage	151
dc.source.conference	Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate	16/09/2002
dc.source.conferencelocation	Oostende Belgium
dc.source.endpage	157
dc.title	A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation
dc.type	Proceedings paper
dspace.entity.type	Publication
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