Authors

Leonov, Vladimir; Perova, Natalia A.; De Moor, Piet; Du Bois, Bert; Goessens, Claus; Grietens, Bob; Verbist, Agnes; Vermeiren, Jan

Conference

MEMS/MOEMS: Advances in Photonics Communications, Sensing, Metrology, Packaging and Assembly

Title

Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy

Publication type

Proceedings paper